Diffusion furnace

Solar diffusion furnace

Solar diffusion furnace
Product Details:

Operating temperature: 300~1200℃
Effective diameter determined according to the proliferation of users, can be customized
Temperature area: 920mm-1350mm (can be customized according to user requirements)
Temperature accuracy (static closed test):
600 ℃ < temperature < 1200 ℃ ± 0.5 ℃
300 ℃ ≤ ≤ of working temperature 600 ℃ ± 1 ℃
Single-point temperature stability (static closed test):
600 ℃ < temperature < 1200 ℃ ± 0.5 ℃/24h
300 ℃ ≤ ≤ of working temperature 600 ℃ ± 1 ℃/24h
Temperature deviation:
Maximum heating rate control (300~1300℃): 15 c/min
Maximum cooling speed (1300~900℃): 5 c/min
Set gas flow accuracy: ± 0.5%FS
Air tightness of the gas system: 1x10-7pa.m3/s
Automatic feeder stroke: ~2000mm
Speed: bearing 5~1000mm/min,SiC pulp 20kg
Number of loaded 400 pieces/tube
Clean cleanliness class 100 (10,000 factory)
Three-phase five wire system 380V ± 10%,50Hz ± 10%Hz;
Cooling water: 2~4Kgf/cm2,~8L/min

Solar cell proliferation are mainly open tubular and close tube soft landing proliferation in two forms

Closed tube phosphorus diffusion, with directional recycling process exhaust gas cooling device, Metaphosphate, CL2, separate collection and handling; technology waste gas collected from the rear directional discharge; various process gases can be separated into the quartz tube, process gas (Phosphorus oxychloride) spray way to introducing the quartz tube can be used. Close tube soft landing diffusion process free from outside interference, and process quality are fully protected.
Automation: automatic control temperature and process. Master temperature control module is imported, the control accuracy of ± 0.25 c.
Access methods: cantilever push-pull the boat. Cantilever push-pull side layout structure is adopted, can effectively prevent metaphosphoric acid drip, resulting in push-pull bodies from corrosion, affecting the accuracy of the push-and-pull bodies.

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Qingdao Yu hao microelectronics equipment co, Ltd (Headquarters)
Address: liuting industrial zone, Chengyang district, Qingdao City, Xie Rong road, 3rd
Toll free phone: 400-0532-778
Office phone: 13805320424

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