Diffusion furnace vertical diffusion furnace (vertical) and horizontal diffusion furnace (horizontal) two types.
Vertical diffusion furnace
Vertical diffusion furnace quartz boat perpendicular to the horizontal plane, more robot friendly shipping wafer, chip technology parameter consistency is better.
Horizontal diffusion furnace quartz boat parallel to the horizon, a 4 or more than 4 technology of furnace tubes, tube covers an area of smaller on average, between process parameters of vertical diffusion furnace is better.
Qingdao Yu hao microelectronics equipment co, Ltd (Headquarters)
Address: liuting industrial zone, Chengyang district, Qingdao City, Xie Rong road, 3rd
Toll free phone: 400-0532-778
Office phone: 13805320424
Website:http://www.qdyuhao888.com
Email:qdyuhaodz@126.com
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